OLS4100 Application

• 반도체/FPD
• 전자 부품 / MEMS
• 재료/금속 가공

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반도체/FPD(Flat Panel Display)

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전자 부품 / MEMS (미세 전자 기계 시스템)

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재료/금속 가공

With the Olympus LEXT OLS4100 laser scanning digital microscope non-contact 3D observations and measurements of surface features at 10 nanometer resolutions are easy to produce. The OLS4100 industrial microscope has distinctive features for fast image acquisition and high-resolution microscope images over a wider area.

• 뛰어난 측정 성능
• 세계 최초* 두개의 성능 보증
• 고품질 이미지
• 더 쉽게, 더 빠르게, 더 광범위하게.

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뛰어난 측정 성능

넓은 샘플 범위

85°이상의 경사도 이미지

OLS4100은 높은 N.A값을 갖는 전용 대물 렌즈와 405nm 레이저의 성능을 극대화 시킨 광학 시스템에 의해서 기존에 측정 불가능했던 급경사면의 이미지를 손쉽게 취득할 수 있습니다.

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10nm의 높이 분해능을 가진 마이크로 프로파일 측정

405nm의 단파장 레이저 빛과 높은 N.A의 전용 대물 렌즈를 사용하여 최대 0.12μm의 평면 분해능을 실현. 샘플 표면의 서브 마이크론 측정이 가능합니다. 또한 고정밀 리니어 스케일과 IZ 커브를 이용한 CFO 검색 (23 페이지 참조)를 채택하여 10nm 이하의 높이 차이를 감지 할 수 있습니다.

 

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반사율 차이에도 대응

OLS4100은 2개의 공초첨 광학 시스템을 탑재한 듀얼 컨포칼 시스템을 사용합니다. 고감도 디텍터(검출기)와 결합하여 서로 다른 반사율을 갖는 샘플에서도 선명한 이미지 구현이 가능합니다.

 

 

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멀티 레이어기능으로 투명한 물체의 측정에 대응

멀티 레이어 모드
OLS4100에 추가 된 멀티 레이어 기능은 여러 레이어 (층)의 반사광 강도의 피크를 인식하여 각 층의 두께를 측정할 수 있습니다.

투명 소재의 멀티 레이어 관찰/측정
멀티 레이어 기능을 사용하면 투명 샘플의 윗 표면에 있는 투명 필름의 관찰과 측정이 가능합니다. 레진이 코팅 되어 있는 샘플에서도 투명체 각 층의 거칠기와 두께의 측정도 가능합니다.

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세계 최초* 두개의 성능 보증

정확도와 반복성

측정 기기로서의 성능은 두 개의 다른 용어로 표현됩니다. 그것은 ‘정확도’과 ‘반복성’입니다. “정확도”는 참값에 얼마나 접근하고 있는지를 나타내고 “반복성”은 여러 번 측정에서 얼마나 변동이 적은가 여부를 나타내는 것입니다. OLS4100은 레이저 현미경으로 업계 최초로 *이 두 성능을 보증합니다.

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보증 체계 시스템

OLS4100은 모든 부품이 엄격한 시스템 아래 하에 제조되고 있습니다. 대물 렌즈부터 본체까지 자사 공장에서 일관 생산하고 엄격한 검사 기준을 거쳐 출하됩니다. 최종 조정과 교정은 실제로 사용되는 환경에서 전문 기술자가 수행합니다.

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넓은 범위의 측정 타입

단차 측정

표면 거칠기 측정

면적/부피 측정

입자 측정(옵션)

기하학적 측정

필름 두께 측정(옵션)

자동 에지 검출/측정(옵션)

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OLYMPUS Stream (옵션)

향상된 이미지 분석 성능을 위한 업무개선 솔루션
소프트웨어 “Olympus Stream”(옵션)에서는 입자 크기 분석 및 비금속 함유율 등이 가능하고 OLS4100으로 부터 바로 연동이 가능합니다.

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더욱 더 진화된 거칠기 측정

LEXT OLS4100 파라미터

OLS4100은 표면 거칠기 측정기의 새로운 기준을 목표로 개발되었습니다. 필요한 대부분의 거칠기 파라미터 필터를 보유하고 있습니다. 그렇기 때문에 기존의 접촉식 표면 거칠기 측정기를 사용하는 사용자는 기존의 장비와 일치한 출력 결과를 얻을 수 있습니다..
또한 OLS4100은 거칠기 전용 모드가 있어 자동 라인 스티치로 최대 100mm까지 거칠기 측정이 가능합니다. OLS4100은 접촉식 표면 거칠기 측정기와 같은 거칠기 (2 차원) 파라미터를 보유하고 있습니다. 접촉식 표면 거칠기 측정기와 같은 조작성, 호환 측정 결과를 얻을 수 있습니다.

기본 프로파일	Pp, Pv, Pz, Pc, Pt, Pa, Pq, Psk, Pku, Psm, PΔq, Pmr(c), Pδc, Pmr
거칠기 프로파일	Rp, Rv, Rz, Rc, Rt, Ra, Rq, Rsk, Rku, Rsm, RΔq, Rmr(c),Rδc, Rmr, RZJIS, Ra75
파형 프로파일	Wp, Wv, Wz, Wc, Wt, Wa, Wq, Wsk, Wku, Wsm, WΔq, Wmr(c), Wδc, Wmr
베어링 영역 커브	Rk, Rpk, Rvk, Mr1, Mr2
모티브	R, Rx, AR, W, Wx, AW, Wte
거칠기 프로파일 (JIS 1994)	Ra(JIS1994), Ry, Rz(JIS1994), Sm, S, tp
기타	R3z, P3z, PeakCount

The STM7 microscopes offer excellent versatility and high performance three axis measurements of parts and electrical components, with sub-micron precision. Whether samples are small or large, simple or complex, or measurements are being taken by a novice or an expert, the Olympus STM7 range features measuring microscopes tailored to fit your needs.

• Accurate Measurements through the Integration of an Optical Microscope and Advanced Measurement Capability
• The STM7 was Designed with Emphasis on Ease of Use
• Accessories that Widen the Range of Observation and Measurement
• Automated Focusing System Provides Superior Repeatability
• System for Achieving More Advanced Measurement

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Accurate Measurements through the Integration of an Optical Microscope and Advanced Measurement Capability

Observation Performance Refined through Years of Microscope Development

The STM7 series uses the same UIS2 infinity-corrected optical system used in state-of-the-art optical microscopes. As a result, observed images have high resolution and high contrast, with aberration thoroughly eliminated to help ensure highly accurate measurement in minute detail.

 

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Measurement Reliability Enhanced with a Stage-Mounting Plate Crafted from Stone

To provide further assurance of measurement accuracy, the STM7 series uses a highly durable, vibration-resistant frame with a granite surface plate. As a result of this stability, measurements can be taken at sub-micron-levels while ensuring minimal error.

 

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Continuing to Provide User-friendly, High-Precision, 3-axis Measurement as a Pioneer of Height Measurement

As modern manufacturing technology becomes increasingly miniaturized and precise, highly accurate measurements are even more essential—not only along the horizontal XY axes, but also along the Z-axis. Olympus has responded to such needs by being the fi rst to realize an autofocus system for measuring microscopes by means of the reflective active, confocal method.

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Dependable Quality Based On a Strict Traceability System

The accuracy of Olympus’ measuring microscopes is controlled by a strict traceability system and Olympus even offers traceable calibration at the time of installation.

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The STM7 was Designed with Emphasis on Ease of Use 

Offering Stages to Fit the Sample Size at Hand

Common Problems

• Short measurement stroke precludes the measurement of larger samples.
• Sample rotation required to compensate for shorter Y than X-axis coverage during measurement is time inefficient. Until now, large stages have offered a sufficient measurement coverage on the X-axis, but only less coverage on the Y-axis.
• Due to the narrow measurement range, it is impossible to line up large numbers of samples on the stage for measurement at once.

STM7 Solutions

• Four types of stages are available, each with a unique square measurement stroke (choose from 50 mm x 50 mm, 100 mm x 100 mm, 200 mm x 200 mm, and 300 mm x 300 mm). From small to large size samples, there is a stage that fits the sample being measured.
• A clutch system enables rapid switching between coarse and fine movements. Thanks to this switching function, the stage can also be moved rapidly along the X- and Y-axes, and freely across the XY plane.
• The 300 mm square length stage enables the same measurement stroke to apply to both the X and Y-axes, which means it can be used to measure large samples, such as 300 mm wafers and printed circuit boards without changing their orientation.

 

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Use the Same Microscope for Both Low- and High-Magnification Observations

Common Problems

• Most conventional measuring microscopes only accept a measuring objective or metallurgical objective, and so are unable to meet the requirements for a wide variety of observations.

STM7 Solutions

• The STM7 accepts both a metallurgical objective and a measuring objective by exchanging a revolving nosepiece with a measuring objective adapter. This means that the STM7 combines both metallurgical optics and measuring optics in one microscope. In this way, the STM7 series satisfi es a range of needs, no matter whether measuring a wide area or tiny region, measuring the size of differences betwe en levels, or assisting the user in deciding on the best observation method to choose.

Measuring Objectives

Because the measuring objectives have an extremely long working distance, they provide confidence when focusing on samples with large peaks and troughs while reducing worries of the objective coming into contact with the sample.
Furthermore, their low-magnifi cation capability enables wide areas to be observed in a single view.

Metallurgical Objectives

Metallurgical objectives enable high-magnifi cation, highresolution observation capability comparable to that of optical microscopes. What’s more, these objectives can be used not only for brightfield, but also for darkfield and DIC observation.

> Click here for details about UIS2 objective lenses

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Manual and Motorized Focusing Model Options

The STM7 Line Includes both Manual and Motorized Focus Options

Focus control is available with either manual or motorized operation. Choose the model that addresses your needs in terms of samples and measurement content, regardless of stage size—with all frames incorporating a linear scale for the Z-axis that enables 3-axis measurement.

Manual Z-axis Focus Models

Manual Z-axis focus models offer excellent cost performance—with familiar handle operation for rapid vertical movement that offers convenience for users who needs to measure samples with variety of heights.

 

Motorized Z-axis Focus Models

Operability is improved and handling fatigue is reduced for focus and height measurements when using the motorized focus unit. The coaxial knobs for coarse and fine movement offer a feeling similar to manual operation, while the models can also be equipped with an autofocus unit.

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A Revolutionary Control Unit Refines Measuring Microscope Usability

Common Problems

• Additional functions require additional operational units. Operators can’t always locate the corresponding unit quickly, which significantly reduces measurement efficiency.
• Numerous operational units and their power supplies around the main unit occupy valuable working space.

STM7 Solutions

Controllers

With the STM7 series, a single controller makes it possible to perform virtually all measuring microscope operations, including use of readout reset, illumination control, focusing, and autofocus. For efficiency and convenience, the unit can be placed wherever you wish and operated easily with one hand.

Control Box

The power supply and transmission for each unit are combined in a single control box. This preserves maximal work space even when a range of optional functions, such as the focus navigator, are added.

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Automatic Light Intensity Adjustment Greatly Improves the Efficiency of Observation and Measurement

Common Problems

• Analog volume adjustment used by conventional measuring microscopes does not enable the quantitative assessment of light intensity, which can lead to variability in measured values as light intensity changes.
• With conventional measuring microscopes, light intensity may need to be adjusted every time the objective is switched—making for an inefficient workflow.

STM7 Solutions

Close Control through a Quantitative Digital Display of Light Intensity Values

The STM7 series provides a quantitative digital display of light intensity—enabling observations to always be made under consistent illumination conditions.

 

Light Intensity Manager Eliminates the Need for Manual Adjustment

Light intensity manager can be used with the coded revolving nosepiece configuration. The coded revolving nosepiece automatically detects the switching of objectives. This allows the illumination method and light intensity to be registered for each objective, and adjusted automatically during measurements when the objective is switched. Now there is no need to manually adjust light intensity, which used to be required with every switch between magnifications.

 

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A Detachable Digital Read Out for Preferred Location Enables Swift, Convenient Checking of Measurement Results and Equipment Status

Common Problems

• The need to check the operation status of equipment, such as illumination, or measured values on individual units makes overall operation cumbersome.

STM7 Solutions

Digital Indicator Enables the Current Operation Status to be Verified Visually

The indicator displays the device status and settings. The minimum X, Y, and Z-axis values can be switched between 0.1 μm and 1 μm, and the display units can be switched between mm, μm, inches and mil.

Detachable Digital Readout Allows for Individual Preference and Placement

Whether attached to the frame or a desk, the placement of the detachable digital readout is up to the individual user. While standing to take measurements, it can be placed on the side of the frame at almost the same height as the site of observation for an exceptional and easy view. When operating from a sitting position, such as observation or measurements on a monitor via a digital camera or when using the motorized Z-axis focusing model, simply place the digital readout and hand controller on the desk.

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Automated Focusing System Provides Superior Repeatability

Achieve Faster, Simpler, More Accurate Height Measurement

Common Problems

Accessories that Widen the Range of Observation and Measurement

Coded Revolving Nosepiece

Combining a coded revolving nosepiece with a digital camera lets you display the objective magnification on-screen during observation and allows you to record that magnification.
This convenient feature allows information on your sample and the objective’s magnification to be recorded at the same time when recording a sample.

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MM6-EMO/ Erect Image Monocular Tube

Monocular tube for erect images. Can be used in combination with MM6-OCC10x (eyepiece with cross hairs).

 

 

 

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STM7-FS/ Foot Switch

Enables hands-free transmission of data, allowing operators to complete measurement without taking hands off the X and Y handles.

 

 

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SZ-LW61/ White LED Illumination Unit

This light-weight, space-saving design model provides a long operating life and low power consumption. The cost-effective LED illumination unit is also free from the flickering and brightness fluctuation.

 

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SZX2-ILR66+SZX-RHS/ LED Ring Illuminator+Manual Control Unit

SZX-RHS manual control unit enables independent illumination of four-segments of the SZX2-ILR66 reflected LED ring illuminator, which provides clear images with high color temperature. The optimal illumination can be selected from 13 patterns.

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Rotatable Stage

Enables easy parallel alignment of sample.

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Example Configurations for Materials Science and Industry

BX53M Reflected and Reflected/Transmitted Light Combination

There are two types of microscope frames in the BX3M series, one for reflected light only and one for both reflected and transmitted light. Both frames can be configured with manual, coded, or motorized components. The frames are outfitted with ESD capability to protect electronic samples.

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BX53M IR Combination

 

IR objectives can be used for semiconductor inspection, measurement, and processing applications where imaging through silicon is required to see the pattern. 5X to 100X infrared (IR) objectives are available with chromatic aberration correction from visible light wavelengths through the near infrared. For highmagnification work, rotating the correction collar of the LCPLNIR series of lenses corrects for aberrations caused by sample thickness. A clear image is obtained with a single objective.

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BX53M Polarized Light Combination

The optics of the BX53M polarized light combination provide geologists with the right tools for high-contrast polarized light imaging. Applications such as mineral identification, investigating the optical characteristics of crystals, and observing solid rock sections benefit from system stability and precise optical alignment.

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Bertrand Lens for conoscopic and orthoscopic observations

With a U-CPA conoscopic observation attachment, switching between orthoscopic and conoscopic observation is simple and fast. It is focusable for clear back focal plane interference patterns. The Bertrand field stop makes it possible to obtain consistently sharp and clear conoscopic images.

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An Extensive Range of Compensator and Wave Plates

Six different compensators are available for measurements of birefringence in rock and mineral thin sections. Measurement retardation level ranges from 0 to 20λ. For easier measurement and high image contrast, the Berek and Senarmont compensators can be used, which change the retardation level in the entire field of view.

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Measuring range of compensators

ompensator	Measuring Range	Major Application
Thick Berek(U-CTB)	0-11,000 nm (20λ)	Measurement of High Retardation Level (R*>3λ), (crystals, macromolecules, fiber, etc.)
Berek(U-CBE)	0-1,640 nm (3λ)	Measurement of Retardation Level (crystals, macromolecules, living organisms, etc.)
SenarmontCompensator(U-CSE)	0-546 nm (1λ)	Measurement of Retardation Level (crystals, living organisms, etc.) Enhancement of Image Contrast (living organisms, etc.)
Brace-Koehler Compensator 1/10λ (U-CBR1)	0-55 nm (1/10λ)	Measurement of Low Retardation Level (living organisms, etc.) Enhancement of Image Contrast (living organisms, etc.)
Brace-Koehler Compensator 1/30λ (U-CBE2)	0-20 nm (1/30λ)	Measurement of image contrast (living organisms, etc.)
Quartz Wedge(U-CWE2)	500-2,200 nm (4λ)	Approximate Measurement of Retardation Level (crystal, macromolecules, etc.)

*R = retardation level

For more accurate measurement, it is recommended that compensators (except U-CWE2) be used together with the interference filter 45-IF546.

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Strain Free Optics

Thanks to Olympus’ sophisticated design and manufacturing technology, the UPLFLN-P strainfree objectives reduce internal strain to the minimum. This means a higher EF value, resulting in excellent image contrast.

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BXFM System

The BXFM can be adapted to special applications or integrated into other instruments. The modular construction provides for straightforward adaptation to unique environments and configurations with a variety of special small illuminators and fixturing mounts.

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Modular Design, Build Your System Your Way

Microscope Frames

There are two microscope frames for reflected light, one also has transmitted Light; capability. An adapter is available to raise the illuminator to accommodate taller samples.

 

■: Possible		Reflected light	Transmitted light	Sample height
1	BX53MRF-S	■		0-65 mm
2	BX53MTRF-S	■	■	0-35 mm
3	BX3M-ARMAD	■	■	+40 mm

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Stands

For microscopy applications where the sample will not fit on a stage, the illuminator and optics can be mounted to a larger stand or to another piece of equipment.

 

 

BXFM + BX53M illuminator configuration

1	BXFM-F	Frame interface is wall mounting/32 mm pillar
2	BX3M-ILH	Illuminator holder
3	BXFM-ILHSPU	Counter spring for BXFM
6	SZ-STL	Large stand

Unit Combination Required: (1, 2 and 6)
Option: 3

BXFM + U-KMAS illuminator configuration

1	BXFM-F	Frame interface is wall mounting/32 mm pillar
4	BXFM-ILHS	U-KMAS holder
5	U-ST	Stand
6	SZ-STL	Large stand

Unit Combination Required: (1, 4 and 5) or (1, 4 and 6)
Option: –

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Tubes

For microscope imaging with eyepieces or for camera observation, select tubes by imaging type and operator’s posture during observation.

		FN	Type	Angle type	Image	Number of diopter  adjustment mechanisms
1	U-BI30-2	22	Binocular	Fixing	Reverse	1
2	U-TBI-3	22	Binocular	Tilting	Reverse	1
3	U-TR30-2	22	Trinocular	Fixing	Reverse	1
4	U-TR30IR	22	Trinocular for IR	Fixing	Reverse	2
5	U-ETR-4	22	Trinocular	Fixing	Erect	2
6	U-TTR-2	22	Trinocular	Tilting	Reverse	2
7	U-SWTR-3	26.5	Trinocular	Fixing	Reverse	2
8	U-SWETTR-5	26.5	Trinocular	Tilting	Erect	2
9	U-TLU	22	Single port	–	–	–
10	U-TLUIR	22	Single port for IR	–	–	–

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Illuminators

The illuminator projects light onto the sample based on the observation method selected. Software interfaces with coded illuminators to read the cube position and automatically recognize the observation method.

 

■: Possible		Coded function	Light source	BF	DF	DIC	POL	IR	FL	MIX	AS /FS
1	BX3M-RLAS-S	Fixed 3 cube position	LED – Built in	■	■	■	■	–	–	■	■
2	BX3M-URAS-S	Attachable 4 cube position	LED	■	■	■	■	–	–	■	■
			Halogen	■	■	■	■	■	–	■	■
			Mercury /Light guide	■	■	■	■	–	■	■	■
3	BX3M-RLA-S		LED	■	■	■	■	–	–	■	■
			Halogen	■	■	■	■	■	–	■	■
4	BX3M-KMA-S		LED – Built in	■	–	■	■	–	–	■	–
5	BX3-ARM	Mechanical arm for transmitted light		–	–	–	–	–	–	–	–
6	U-KMAS		LED	■	–	■	■	–	–	■	–
			Halogen	■	–	■	■	■	–	■	–

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Light Sources

Light sources and power supplies for sample illumination, choose the appropriate light source for the observation method.

 

 

Standard LED light resource configuration

1	BX3M-LEDR	LED lamp housing for reflected light
2	U-RCV	DF converter for BX3M-URAS-S, required for observation with DF and BF when necessary
3	BX3M-PSLED	Power supply for LED lamp housing, requires BXFM system
4	BX3M-LEDT	LED lamp housing for transmitted light

Unit Combination Required: (1 and 3) or 4^*1
Option: 2
*1：Only using BX53MTRF-frame

Fluorescence standard light resource configuration

5	U-LLGAD	Light guide adapter
2	U-RCV	DF converter for BX3M-URAS-S, required for observation with DF and BF when necessary
6, 7	U-LLG150 (300)	Light guide, length:1.5 m (3 m)
8	U-HGLGPS	Light source for fluorescence

Unit Combination Required: (5, 6 and 8) or (5, 7 and 8)
Option: 2

Fluorescence mercury light resource configuration

9, 10	U-LH100HG(HGAPO)	Mercury lamp housing for fluorescence
2	U-RCV	DF converter for BX3M-URAS-S, required for observation with DF and BF when necessary
11	U-RFL-T	Power supply for 100W mercury lamp

Unit Combination Required: (9 and 11) or (10 and 11)
Option: 2

Halogen and Halogen IR light resource configuration

12	U-LH100L-3	Halogen lamp housing
13	U-LH100IR	Halogen lamp housing for IR
14	U-RMT	Extender cable for halogen lamp housing, cable length 1.7 m (requires cable extension when necessary)
15, 16	TH4-100 (200)	100V (200V) specification power supply for 100W/50W halogen lamp
17	TH4-HS	Hand switch for light intensity of halogen (dimmer TH4-100 (200) without hand switch)

Unit Combination Required: (12 and 15) or (12 and 16) or (13 and 15) or (13 and 16)
Option: 14, 17

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Nosepieces

Attachment for objectives and sliders. Select by the number of objectives needed and types; also with/without slider attachment.

 

 

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Sliders

Select the slider to compliment traditional brighfield observation. The DIC slider provides topographic information about the sample with options to maximize contrast or resolution. The MIX slider provides illumination flexibility with a segmented LED source in the darkfield path.

		Type	Amount of shear	Available objectives
1	U-DICR	Standard	Medium	MPLFLN, MPLAPON, LMPLFLN, and LCPLFLN-LCD
2	U-DICRH	Resolution	Small	MPLFLN, MPLAPON
3	U-DICRHC	Contrast	Large	LMPLFLN and LCPLFLN-LCD

MIX slider for MIX observation.

		Type	Available objectives
4	U-MIXR	MIX slider	MPLFLN-BD, LMPLFLN-BD, MPLN-BD

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Controls Box and Hand Switches

Control boxes for interfacing microscope hardware with a PC and hand switches for hardware display and control.

 

 

BX3M-CB (CBFM) configuration

1	BX3M-CB	Control box for BX53M system
2	BX3M-CBFM	Control box for BXFM system
3	BX3M-HS	MIX observation control, indicator of coded hardware, programmable function button of software (Stream)
4	BX3M-HSRE	Motorized nosepiece rotation
5	U-HSEXP	Shutter operation of camera

Unit Combination Required: 1 or 2
Option: 3, 4, 5

U-CBS configuration

6	U-CBS	Control box for coded functions in BXFM configuration
5	U-HSEXP	Shutter operation of camera

Unit Combination Required: 6
Option:  5

 Cable

–	U-MIXRCBL (ECBL)	U-MIXR cable, cable length: 0.5 m (2.9 m)
	BX3M-RMCBL (ECBL)	Motorized nosepiece cable, cable length: 0.2 m (2.9 m)

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Stages

Stages and stage plates for sample placement. Select based on sample shape and size.

 

 

150 mm × 100 mm stage configuration

 

 

■: Possible		FN	Diopter adjustment mechanism	Built-in cross reticle
1	WHN10x	22
2	WHN10x-H	22	■
3	CROSS WHN10x	22	■	■
4	SWH10x-H	26.5	■
5	CROSS SWH10x	26.5	■	■

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Optical Filters

Optics filters convert sample exposure light to various types of illumination. Select the appropriate filter for observation requirements.

 

 

 

 

1	U-AC2	Abbe condenser (available from 5x objectives)
2	U-SC3	Swing-out condenser (available from 1.25x objectives)
3	U-LWCD	Long working distance condenser for glass plate (U-MSSPG, U-SPG64)
4	U-POC-2	Swing-out condenser for POL

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Mirror Units

Mirror unit for BX3M-URAS-S. Select the unit for required observation.

 

 

1	U-FBF	For BF, detachable ND filter
2	U-FDF	For DF
3	U-FDICR	For POL, crossed nicol position is fixed
4	U-FBFL	For BF, built-in ND filter (It is necessary to use both BF* and FL) *For coaxial episcopic illumination only
5	U-FWUS	For Ultra Violet-FL BP330-385 BA420 DM400
6	U-FWBS	For Blue-FL BP460-490 BA520IF DM500
7	U-FWGS	For Green FL BP510-550 BA590 DM570
8	U-FF	Empty mirror unit, Used user’s optical element

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Intermediate Tubes

Various types of accessories for multiple purposes. For use between tube and illuminator.

 

 

1	U-CA	Magnification changer (1x, 1.25x, 1.6x, 2x)
2	U-ECA	Magnification changer (1x, 2x)
3	U-EPA2	Eye point adjuster: + 30 mm
4	U-DP	Dual port for U-DP1xC
5	U-DP1xC	C-mount TV camera adapter for U-DP
6	U-TRU	Trinocular intermediate unit

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UIS2 Objectives

Objectives magnify the sample. Select the objective that matches the working distance, resolving power and observation method for the application.

> Click here for details about UIS2 objective lenses

A History of Leading-edge Optics

Superior Optical Performance： Wave Front Aberration Control

When using a microscope for advanced research or system integration, optical performance must be standardized for all objectives. Olympus’ UIS2 objectives go beyond conventional numerical aperture (NA) and working distance (WD) performance standards by providing wave front aberration control, that minimizes the aberrations that lower resolution.

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Stable Color Temperature and High-Intensity White LED Illumination

The BX3M utilizes a high-intensity white LED light sources for both reflected and transmitted light. The LED maintains a consistent color temperature regardless of intensity. LEDs provide efficient, long-life illumination that is ideal for inspecting materials science applications.

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Superior Quality for Advanced Performance

Support Precise Measurement： Auto Calibration

Similar to digital microscopes, automatic calibration is available when using OLYMPUS Stream. Auto-calibration eliminates human variability in the calibration process leading to more reliable measurements. Auto calibration uses an algorithm that automatically calculates the correct calibration from an average of multiple measurement points. This minimizes variance introduced by different operators and maintains consistent accuracy, improving reliability for regular verification.

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Seamless Stitching : Image Shading Correction

Shading correction is implemented within OLYMPUS Stream software to accommodate for shading around the corners of an image. When used with intensity threshold settings, shading correction provides more precise analysis. Additionally, a more uniform panoramic image is acquired when tiling images with MIA.

• Left image: Raw image illustrating shading where images were stitched together
• Right image: Shading correction produces even illumination across the field of view

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Functionality for a Range of Inspection and Analytical Tasks

The Invisible Becomes Visible: MIX Observation

The BX3M’s MIX observation technology combines traditional illumination methods with darkfield illumination. When the MIX slider is used, its ring of LEDs shine directional darkfield on the sample. This has a similar effect to traditional darkfield, but provides the ability to select a quadrant of the LEDs in order to direct the light from different angles. This combination of directional darkfield and brightfield, fluorescence, or polarization is called MIX illumination, and is especially helpful to highlight defects and differentiate raised surfaces from depressions.

Conventional 

Brightfield shines the light straight down on the sample while traditional darkfield highlights scratches and imperfections of a flat surface by illuminating the sample from the side of the objective.

Advanced

MIX is a combination of either brightfield, fluorescence, or polarized light and directional darkfield from a ring of LEDs. The LEDs can be adjusted to select which direction to illuminate from. This provides unique contrast and highlights features on the surface that cannot seen with conventional methods.

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Easily Move the Stage for Panorama: Instant MIA

You can now stitch images easily and quickly just by moving the XY knobs on the manual stage; no motorized stage is necessary. OLYMPUS Stream uses pattern recognition to generate a panoramic image giving users a wider field of view than a single frame.

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Create All-in-focus Images: EFI

The Extended Focus Imaging (EFI) function within OLYMPUS Stream captures images of samples whose height extends beyond the depth of focus of the objective and stacks them together to create one image that is all in focus. EFI can be executed with either a manual or motorized Z-axis and creates a height map for easy structure visualization. It is also possible to construct an EFI image while offline within Stream Desktop.

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Capture Both Bright and Dark Areas: HDR

Using advanced image processing, high dynamic range (HDR) adjusts for differences in brightness within an image to reduce glare. HDR improves the visual quality of digital images thereby helping to generate professional-looking reports.

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Adaptable to Suit Observational and Analysis Preferences

Wide Choice of Observation Methods

Reflected light microscopy spans a range of applications and industries.These are just some of the examples of what can be achieved using different observation methods, such as brightfield(BF), darkfield(DF), differential Interference Contrast(DIC), polarized light(PL), fluorescence(FL), infra-red(IR), and transmitted light(TL).

 

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Routine or Basic Measurement Functions

Various measurement functions are available through OLYMPUS Stream so that the user can easily obtain useful data from the images. For quality control and inspection, measuring features on images are often required. All levels of OLYMPUS Stream licenses include interactive measurement functions such as distances, angles, rectangles, circles, ellipses, and polygons. All measured results are saved with the image files for further documentation.

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Count and Measure

Object detection and size distribution measurement are among the most important applications in digital imaging. OLYMPUS Stream incorporates a detection engine that utilizes threshold methods to reliably separate objects (e.g., particles, scratches) from the background.

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Materials Science Solutions

OLYMPUS Stream offers an intuitive, workflow-oriented interface for complex image analysis. At the click of a button, the most complex image analysis tasks can be executed quickly, precisely, and in compliance with most common industrial standards. With a significant reduction in processing time for repeated tasks, materials scientists can concentrate on analysis and research. Modular add-ins for inclusions and intercept charts are easily performed at any time.

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3D Sample Measurement

When using an external motorized focus drive, an EFI image can be quickly captured and displayed in 3D. The height data acquired can be used for 3D measurements on the profile or from the single view image.

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Accommodates a Wide Range of Samples

View More Sample Types and Sizes

The new 150 × 100 mm stage provides a longer travel in the X direction than previous models. This, together with the flat-top design, enables large samples or multiple samples to be easily placed on the stage. The stage plate has tapped holes to attach a sample holder. The larger stage provides flexibility to users by enabling them to inspect more samples on one microscope, saving valuable lab space. The stage’s adjustable torque facilitates fine positioning under high magnification with a narrow field of view.

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Flexibility for Sample Height and Weight

Samples up to 105 mm can be mounted on the stage with the optional modular unit. Due to the improved focusing mechanism, the microscope can accommodate a total weight (sample + stage) of up to 6 kg. This means that larger and heavier samples can be inspected on the BX3M, so fewer microscopes are required in the lab. By strategically positioning a rotatable holder for 6-inch wafers off-center, users can observe the whole wafer surface by just rotating the holder when moving through the 100 mm travel range. The stage’s torque adjustment is optimized for ease of use and the comfortable handle grip makes it easy to find the region of interest of the sample.

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Flexibility for Sample Size

When samples are two large to place on a traditional microscope stage, the core optical components for reflected light microscopy can be configured in a modular configuration. This modular system, the BXFM, can be mounted to a larger stand via a pole or mounted to another instrument of choice using a mounting bracket. This enables users to take advantage of Olympus’ renowned optics even when their samples are unique in size or shape.

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Protect Electronic Devices from Electrostatic Discharge: ESD Compatible

The BX3M has an ESD dissipation capability that protects electronic devices from static electricity caused by human or environmental factors.

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Comfortable and Easy to Use

 

Traditional Techniques Made Easy: Simple Illuminator

The illuminator minimizes complicated actions that are usually necessary during microscope operation. A dial at the front of the illuminator enables the user to easily change the observation method. An operator can quickly switch between the most frequently used observation methods in reflected light microscopy, such as from brightfield, to darkfield, to polarized light, in order to readily change between different types of analysis. In addition, simple polarized light observation is adjustable by rotating the analyzer.

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Intuitive Microscope Controls: Simple FS and AS Settings

Using the proper aperture stop and field stop settings provides good image contrast and makes full use of the numerical aperture of the objective. The legend guides the user to the correct setting based on the observation method and objective in use.

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Find the Focus Quickly: Focus Scale Index

The focus scale index on the frame supports quick access to the focal point. Operators can roughly adjust the focal point without viewing the sample through an eyepiece, saving time when inspecting samples that are different heights.

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For Consistent Illumination: Light Intensity Manager

During the initial setup, the illumination intensity can be adjusted to match the specific hardware configuration of the coded illuminator and/or coded nosepiece.

Similar to conventional microscopes, the image appears darker with increasing magnification and observation methods that consume more light

The microscope automatically adjusts the light intensity to the correct value when changing magnification or observation method

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Easy and Ergonomic Operation

Ergonomics are of the utmost importance for all users. Both standalone microscope users and those integrating with OLYMPUS Stream image analysis software benefit from ergonomic handset controls that clearly display the hardware position. The simple handsets enable the user to focus on their sample and the inspection they need to perform.

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A System Designed for Image Analysis

For Restoring Microscope Settings： Coded Hardware

The BX3M employs new coded functions that integrate the microscope’s hardware settings with OLYMPUS Stream image analysis software. The observation method, illumination intensity, and objective position are all recorded within the software and/or the handset. The coded functions enable the microscope settings to be automatically saved with each image, making it easier to reproduce the settings at a later time and provide documentation for reporting purposes. This saves the operator time and minimizes the chance that an incorrect setting will be used. The current observation settings are always clearly displayed both on the hand switch and in the software.

BX53M

Ease of use

Feature

Image quality

Configuration

Designed with modularity in mind, the BX3M series provide versatility for a wide variety of materials science and industrial applications. With improved integration with OLYMPUS Stream software, the BX3M provides a seamless workflow for standard microscopy and digital imaging users from observation to report creation.

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User-Friendly

• Traditional Techniques Made Easy: Simple Illuminator
• Intuitive Microscope Controls: Simple FS and AS Settings
• Find the Focus Quickly: Focus Scale Index
• Consistent Illumination: Light Intensity Manager
• Easy and Ergonomic Operation
• Easy Restore Microscope Settings: Coded Hardware
• Basic Measurement Functions

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Functional

• The Invisible Becomes Visible: MIX Observation
• Create All-in-focus Images: EFI
• Easily Move the Stage for Panorama: Instant MIA
• Capture Both Bright and Dark Areas: HDR
• Adaptable to Suit Observational and Analysis Preferences
• Accommodates a Wide Range of Samples

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Precision Optics

• Superior Optical Performance: Wave Front Aberration Control
• Stable Color Temperature and High-Intensity White LED Illumination
• Support Precise Measurement: Auto Calibration
• Seamless Stitching : Image Shading Correction

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Fully Customizable

• Various configurations to meet users’ requirements
• Modular Design, Build Your System Your Way

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SZX10

OLYMPUS SZX10은 Working Distance와 Field Size가 중요할 때 선택하시는 모델입니다. 렌즈의 디자인에 따라 왜곡현상없이 제품 혹은 샘플의 고유 색감을 그대로 관찰하실 수 있습니다.

• 안정성 및 반복성
• 인체공학적이고 빠른 사용
• 지능적인 디지털 영상

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안정성 및 반복성

 빠른 검사가 가능한 조절 손잡이

0.63배 에서 6.3배에 이르는 넓은 범위의 배율은 듀얼 렌즈 홀더를 통해 더 높은 배율도 볼 수 있으며, 별도의 렌즈 교체 없이 다양한 배율에서의 관찰이 가능합니다. 축을 이루는 빛 경로 설정의 장점은 카메라로 찍은 측정값이 현미경에서 샘플의 방향에 상관없이 모든 방향으로 안정적이고 정확하며 많은 영상 및 측정 작업들은 같은 배율에서 일관성있고 비교할 수 있는 정확한 결과값을 보장합니다. 11개의 click-stop 지점들은 중요한 기능들을 빠르고 쉽게 사용할 수 있도록 합니다.

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8개의 호환가능한 렌즈로부터의 뛰어난 성능

DFPL2x/DPFL1.5x /DFPL 0.75x /DFPL 0.5x : DFPL 렌즈 시리즈는 뛰어난 색 재현성과 샘플의 모양을 정확하게 구현합니다.

DFPLAPO 1.25x /DFPLAP01x4 : 색 수차 및 구면 수차를 제거한 가장 높은 성능의 렌즈로 뛰어난 분해능과 contrast, 이미지 평면도와 최소한의 왜곡 등의 특징을 가집니다.

SZX-ACH1.25x /SZX-ACH1x : Long Working Distance와 고분해능을 갖춘 균형잡힌 렌즈입니다.

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인체공학적이고 빠른 사용

 

인체공학적으로 편안한 사용 환경

OLYMPUS는 인체공학적인 디자인이 사용자들에게 가장 중요한 요소라고 믿습니다. 따라서, 모든 동작은 사용하기 쉽고 눈이 편안한 접안렌즈, 낮은 위치의 스탠드 등으로 사용하는데 발생할 수 있는 스트레스를 최대한으로 줄였습니다.
SZX2 실체현미경의 고급화된 OLYMPUS Comfort View 접안렌즈는 3D 이미지를 볼 수 있도록 넓은 범위를 한 번에 볼 수 있게하며 장시간 사용시에도 편안함을 가져다 줍니다.
또한 눈의 피로를 줄이며 실체 이미지를 더 쉽게 볼 수 있게 합니다. OLYMPUS는 튜브(헤드) 부분의 각도가 5~45로 조절할 수 있어 다양한 사용자들이 만족하며 사용할 수 있습니다.

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자동기능

SZX10 전동 초점 장치는 화장 초점 영상(EFI)와 완벽하게 자동화된 디지털 문서를 만들 수 있습니다. 이러한 기능은 3D 이미지를 만들 수 있으며, 문서상의 이미지와 실제 눈으로 본 이미지의 격차를 줄여줍니다. 자동 검사를 용이하게하기 위해 OLYMPUS STREAM 이미징 소프트웨어 제품군은 간단한 2D 측정부터 복잡한 위상 분석에까지 다양한 환경에 사용하기 쉬운 모든 도구들을 제공합니다.

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다양한 종류의 스탠드와 조명 장치

OLYMPUS SZX2는 OLYMPUS LED 기반의 특별한 시스템을 갖추고 있어 투과 조명의 미세한 조정으로 밝기와 영상을 컨트롤 하실 수 있습니다. 울트라 슬림의 40mm Base와 함께 SZX2는 가장 인체공학적인 높이의 스테이지를 지원합니다. 게다가 명시야, 암시야,  Oblique 조명의 선택을 회전식 스위치를 통해 쉽게 할 수 있습니다. 긴 수명의 LED는 샘플이나 스테이지에 열을 전달하지 않으며 Material 실체현미경으로써의 유연성을 강화하였습니다.

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다양한 종류의 반사형 조명 장치

링 라이트 방식의 조명이나 동축 조명등의 다양한 반사형 조명유닛들의 사용이 가능합니다. 사용자의 어플리케이션에 맞는 최적의 조명 시스템을 선택하실 수 있습니다.

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지능적인 디지털 영상

디지털 영상

SZX16과 함께 당신은 샘플의 실시간 디지털 영상을 보여주거나 문서를 제작하고 싶어질 것입니다. OLYMPUS 쿨링 방식의 DP를 같이 사용하여 매우 유용한 이미징 스테이션을 구착할 수 있습니다. 이 것은 빠른 속도의 라이비 영상 관찰 뿐만 아니라 고해상도(1730)만화소까지)의 문서 제작도 가능합니다. 발전된 인터페이스는 샘플이 움직이는 동안에도 색재현성이 뛰어나고 색변화가 자유롭습니다.

OLYMPUS의 정교한 현미경 디지털 카메라 및 이미지 분석 소프트웨어 패키지는 관찰, 리포트 생성, 데이터베이스, 보관 및 SZX16 전동 줌 초점 제어를 포함한 다수를 작업을 지원합니다. OLYMPUS가 디지털 카메라 및 분석 / 측정 소프트웨어의 전체 라인을 제공하며, 고객님의 OLYMPUS 담당자는 사용자의 요구 사항에 맞춰 충족시켜드릴 수 있도록 도와 드릴 것입니다.

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Work Comfortably and Productively

Natural Posture, Reduced Stress, and Increased Productivity

The ergonomic long tilting trinocular provides an optimized work position by bringing the microscope closer to the user while the extendable eyepoint adjuster provides flexibility for users of different heights. The SZX series’ ergonomic instruments reduce stress during observation by providing the most comfortable position for each user, increasing work efficiency.

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Convergence Angle in Tube Relieves Eyestrain

Olympus research established a correlation between stereo microscope optical systems and eyestrain. Certain convergence angles between the left and right optical paths can cause discomfort. The SZX2 series is designed with a convergence angle that completely compensates for each optical path. This solution effectively eliminates eyestrain, even during prolonged observation.

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Ergonomic Zoom and Focus Knobs for Fatigue-free Use

The position of the zoom knob, size and position of the coarse/fine focusing knob, and the fine focus stroke are designed for easy operation. The enhanced fine focus stroke results in easy and precise focusing.

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Slim Design Illumination Stand for Easy Access to Samples

Illumination stands are designed to be easy to use and fatigue-free. The slim LED transmitted light illumination stand, at approximately 40 mm in height, features easily adjustable fingertip illumination control and provides easy access to samples.

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Specification

Research Stereomicroscope System SZX10 Specifications
Optical System		Galilean Optical System
Total Magnification		3.15x-378x*1
Zoom Body	Zoom Ratio	10 (0.63x-6.3x)
	AS	Built-in
Observation Tube		Binocular/Trinocular/Tilting Trinocular Observation Tube
Extendable Eyepoint Adjuster		SZX2-EEPA
Focus		Focusing Unit/Coarse Fine Focusing Unit/Heavy-duty Coarse Fine Focusing Unit/Motorized Focusing Unit
Objective Lens	Magnification	Type	N.A.	W.D. (mm)	Total Magnification *2 *3	Field Diameter of View (mm)*2 *3
	0.5x	Plan Achromat	0.05	171	3.2x-31.5x	Ø69.8-Ø7
	0.75x	Plan Achromat	0.075	116	4.7x-47.3x	Ø46.6-Ø4.7
	1x	Plan Apochromat	0.1	81	6.3x-63x	Ø34.9-Ø3.5
		Achromat	0.1	90	6.3x-63x	Ø34.9-Ø3.5
	1.25x	Plan Apochromat	0.125	60	7.9x-78.9x	Ø27.9-Ø2.8
		Achromat	0.125	68	7.9x-78.9x	Ø27.9-Ø2.8
	1.5x	Plan Achromat	0.15	45.5	9.5x-94.5x	Ø23.3-Ø2.3
	2x	Plan Achromat	0.2	33.5	12.6x-126x	Ø17.5-Ø1.7
Dimensions (W x D x H)		285 mm x 335 mm x 400 mm
Weight		7 kg (in Standard Configularion)
Remark		*1 total magnification range possible by combining an objective lens and eyepiece *2 in the case of using eyepiece 10x *3 SZX2-LTTR: intermediate magnification is 1.25X, SZX2-ILLC16/10: intermediate magnification is 1.5X

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